The AVCS3SD Automated Vacuum Calibration System is designed for fast, precision automatic, semiautomatic, or manual calibration and verification of various vacuum gauges at pressures from 1.3×10⁻³ to 1.3×10⁵ Pa (1×10⁻⁵ to 1000 Torr). The system provides calibration capabilities for Capacitance Manometers, Pirani, Piezo, Cold Cathode (Penning), Hot Cathode (Bayard-Alpert), and other types of gauges.
The system is compliant with the requirements of the ISO 3567:2011(E) standard, “Vacuum gauges – Calibration by direct comparison with a reference gauge.”
The system incorporates three high-accuracy NIST- or PTB-traceable transfer standards with an accuracy of up to ±0.025% (±zero and span), temperature regulated at 45°C; and a fully automatic, patent-pending pressure and process control system, along with a Calibration Management Software.
The stainless steel vacuum chamber incorporates 3 ports for the Transfer Standards and 3 Test Ports equipped with KF16-style flanges. All test and transfer standard ports incorporate automatic failsafe isolation valves. The two-stage pumping system consists of a dry (scroll) backing pump and a turbomolecular pump.
The system is built on a cleanroom-compatible aluminum frame with all of the components mounted within the frame footprint. The frame has built-in casters and leveling pads.
AVCS automation consists of a PC running the GUI and process control and an Allen-Bradley PLC responsible for the operation of the vacuum hardware and pressure control loop.
AVCS offers a built-in Calibration Management Software suite to ensure compliance with ISO 90XX, ISO/IEC 17025, ANSI Z540, and other industry-specific quality standards.
High Accuracy Transfer Standards
Up to three NIST- or PTB-traceable standards, with a basic accuracy of up to ±0.025% of reading
Number of Test Ports
3
Base Pressure
Less than 7 × 10⁻⁵ Pa (5 × 10⁻⁷ Torr)
Pressure Control Range
Fully automatic pressure control from 1.3 × 10⁻³ to 1.3 × 10⁵ Pa (1 × 10⁻⁵ to 1 × 10³ Torr)
Pressure Control Resolution
Up to 0.01% of setpoint
Operating Modes
Automatic, Semi-Automatic, Manual Service
Data Averaging
10 to 99 points
Thermal Transpiration Correction
On/Off for Standards and/or UUTs
(Calculations per the Takaishi-Sensui formula)
Process/Calibration Gas
Nitrogen or Dry Air
Dry Pumping System
Scroll and turbomolecular pumps
Fully Enclosed Cabinet
Eliminates temperature variations and reduces uncertainty contributions caused by temperature drift
Cleanroom Compatibility
Fully compatible
ISO Compliance
Fully compliant with ISO 3567: Vacuum Gauges — Calibration by Direct Comparison with a Reference Gauge
Data and System Security
Secure databases providing a clear audit trail for:
- Process recipes
- Calibration data
- Event logs
Calibration Management Software Suite
- Create and print Calibration Certificates
- View and track calibration history and trends
- Create and save unlimited calibration and UUT recipes
Power Requirements
110/230 VAC, 50/60 Hz, 15A
AVCS3SD Product Brochure
* If you plan to use your own standards, please consult our Sales Department.
Examples:
AVCS3SD-210-Y-AP
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Three standards: 100 Torr, 10 Torr, and 1 Torr, with a basic accuracy of ±0.05%
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0 to 10 VDC input for UUTs for automatic data collection
-
±15 VDC linear power supply for UUTs
AVCS0SD-320-X-M
- The System will be pre-configured to use your own 1000T, 100T, 1T standards with Basic
Accuracy of ±0.08%. - Manual data input for all UUT types
Options description:
Option A – 0 to 10 VDC Inputs for UUTs
The system captures readings from gauges with 0 to 10 VDC full-scale analog outputs. This option supports most capacitance manometers (also known as capacitance diaphragm gauges). It may be used in conjunction with the optional ±15 VDC linear power supply (see Option P).
Option P – ±15 VDC Linear Power Supply
Provides the required power for up to three capacitance manometers without the need for external controllers or power supplies.
Option C – 4 to 20 mA Inputs for UUTs
The system captures readings from gauges with 4 to 20 mA full-scale analog outputs.
Option R – RS-232/485 Inputs for UUTs
The system captures readings from gauges with RS-232/485 outputs. Additional commands, such as zeroing, can also be programmed for automatic execution.
Option M – Manual Data Input
The system is configured for manual data entry for all UUT types.