System Description
VMS2HA (High Accuracy) is a High Accuracy model from a new family of calibration systems developed by Vacuum Metrology Systems. VMS2 family design builds on experience and customer feedback gained during development and production of our AVCS system.
VMS2HA is a truly portable fully automatic calibration system for onsite calibration of vacuum gauges for semiconductor, pharmaceutical, aerospace and many other industries. In addition to portability and unsurpassed accuracy, VMS2HA offers a built in Calibration Management Software suite to ensure compliance with ISO 90XX, ISO/IEC 17025, ANSI Z540 and other industry specific quality standards.
The system utilizes up to 3 high accuracy NIST or PTB traceable vacuum transfer standard with basic accuracy of up to .025% . The standards coverage can be custom configured to provide the best accuracy throughout the required calibration pressure range. The proprietary pressure control algorithm allows for the repeatable control resolution of up to 0.01% of the set point.
VMS2HA system is fully compatible with the requirements of ISO-3567.
VMS2HA can be configured to utilize the Transfer Standards that your company already own.
Specs
High Accuracy Transfer Standards
up to 3, NIST or PTB traceable, with basic accuracy of up to ±0.025% of the reading
Number of Test Ports
3
Base Pressure
Less than 7x10-5 Pa (5x10-7 Torr)
Pressure Control Range
Fully Automatic Pressure Control from 1.3x10-3 to 1.3x10+5 Pa (1x10-5 to 1x10+3 Torr)
Pressure Control Resolution
Up to 0.01% of set point
Operating Modes
Automatic, Semi-Automatic, Manual, Service
Data Averaging
10 to 99 points
Thermal Transpiration Correction
On/Off for Standards and/or UUTs
(Calculations per Takaishi-Sensui formula)
Process/Calibration Gas
Nitrogen or Dry Air
Dry Pumping System
Scroll + Turbomolecular pumps
Fully Enclosed Cabinet
Eliminates temperature variations and removes the uncertainty contributions caused by the temperature drift.
Cleanroom Compatibility
Fully Compatible
ISO Compliance
Fully compliant with ISO 3567: Vacuum Gauges — Calibration by direct comparison with a reference gauge
Data and System Security
Secure databases for clear audit trail:
- process recipes
- calibration data
- Event logger database
Calibration Management Software Suite
- Create and Print Calibration Certificates
- View and Track calibration history and Trends
- Create and Save unlimited Calibration and UUT recipes
Power Requirements
110/230 VAC, 50/60 Hz, 15A
Dimensions
VMS2HA Ordering Information
* If you are planning to use your own standards (Please consult our sales department)
Examples:
VMS2HA-3-210-Y-AP
3 Standards: 100T, 10T, 1T with Basic Accuracy of ±0.05%
0…10 VDC input for UUTs for Automatic data collection
±15VDC Linear Power Supply for UUTs
VMS2HA-0-10K-X-M
The System will be pre-configured to use your own 10T, 1T and 0.1T standards with Basic Accuracy of ±0.08%.
Manual data input for all UUT types
Options description:
0…10 VDC Inputs for UUTs (Option “A”):
The System will capture readings from gauges with 0…10 VDC full scale analog outputs. This will cover most of the Capacitance Manometers (a.k.a. Capacitance Diaphragm Gauges). The option may be used along with the optional ±15 VDC linear power supply (see below).
±15 VDC linear power supply (Option “P”):
The power supply will provide the required power to up to 3 Capacitance Manometers without the need for an external controllers/power supplies.
4…20 mA Inputs for UUTs (Option “C”):
The System will capture readings from gauges with 4…20 mA full scale analog output.
RS232/485 Inputs for UUTs (Option “R”):
The System will capture readings from gauges with RS232/485 output. Additional RS232/485 commands, such as Zeroing, can be programmed to be processed automatically as well.
Manual Data Input (Option “M”):
The System will be configured for the manual data input for all UUT types
